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Publication Information
Title
Japanese:
English:
Effects of Metal Layer Insertion on EOT scaling in TiN/Metal/ La2O3 Si High –k Gate Stacks
Author
Japanese:
パールハットアヘメト
,
来山大祐
,
金田翼
,
鈴木 拓也
,
小柳友常
,
幸田みゆき
,
マイマイティ マイマイティレャアティ
,
川那子高暢
,
角嶋邦之
,
筒井一生
,
西山彰
,
杉井信之
,
名取研二
,
服部健雄
,
岩井洋
.
English:
Ahmet Parhat
,
来山大祐
,
金田翼
,
鈴木 拓也
,
Tomotsune Koyanagi
,
Miyuki Kouda
,
マイマイティ マイマイティレャアティ
,
Takamasa Kawanago
,
Kuniyuki KAKUSHIMA
,
KAZUO TSUTSUI
,
西山彰
,
Nobuyuki Sugii
,
KENJI NATORI
,
takeo hattori
,
HIROSHI IWAI
.
Language
English
Journal/Book name
Japanese:
English:
Volume, Number, Page
Published date
2011
Publisher
Japanese:
English:
Conference name
Japanese:
English:
,219th ECS Meeting
Conference site
Japanese:
English:
Montreal
©2007
Tokyo Institute of Technology All rights reserved.