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Title
Japanese:An Effective Process for Oxygen Defects Suppression for La-based Oxide Gate Dielectric 
English: 
Author
Japanese: 川那子高暢, 鈴木 拓也, 角嶋邦之, パールハットアヘメト, 筒井一生, 西山彰, 杉井信之, 名取研二, 服部健雄, 岩井洋.  
English: Takamasa Kawanago, 鈴木 拓也, Kuniyuki KAKUSHIMA, Ahmet Parhat, KAZUO TSUTSUI, 西山彰, Nobuyuki Sugii, KENJI NATORI, takeo hattori, HIROSHI IWAI.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date 2010 
Publisher
Japanese: 
English: 
Conference name
Japanese:複合創造領域シンポジウム 
English: 
Conference site
Japanese: 
English: 

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