表面導電性を考慮した微小誘電体静電マニピュレーション信頼性の向上

Publication Information

Title

Japanese:	表面導電性を考慮した微小誘電体静電マニピュレーション信頼性の向上
English:	Improving Reliability in Electrostatic Manipulation of a Dielectric Micro-particle Considering Surface Conductivity

Author

Japanese:	藤原亮, 山島篤志, 高橋邦夫, 齋藤滋規.
English:	Ryo FUJIWARA, Atsushi Yamashima, KUNIO TAKAHASHI, Shigeki SAITO.

Language

Japanese

Journal/Book name

Japanese:	2010年度精密工学会春季ん大会論文集
English:

Volume, Number, Page

pp.641-642

Published date

Mar. 2010

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: