微小導体静電マニピュレーションの信頼性向上のための操作条件最適化

Publication Information

Title

Japanese:	微小導体静電マニピュレーションの信頼性向上のための操作条件最適化
English:	Optimization of operational design for electrostatic manipulation of a conductive micro-particle with high reliability

Author

Japanese:	澤井賢司, 園田雅樹, 齋藤滋規.
English:	Kenji SAWAI, Masaki SONODA, Shigeki SAITO.

Language

Japanese

Journal/Book name

Japanese:	2009年度精密工学会春季大会論文集
English:

Volume, Number, Page

pp.759-760

Published date

Mar. 2009

Publisher

Japanese:
English:

Conference name

Japanese:	2009年度精密工学会春季大会
English:

Conference site

Japanese:
English: