Electrostatic Chuck Consisting of Electrostatic Inductive Polymer Fibers for Handling of Curved Surface

Publication Information

Title

Japanese:
English:	Electrostatic Chuck Consisting of Electrostatic Inductive Polymer Fibers for Handling of Curved Surface

Author

Japanese:	澤井賢司, 宝田亘, 鞠谷雄士, 高橋邦夫, 齋藤滋規.
English:	Kenji SAWAI, wataru takarada, TAKESHI KIKUTANI, KUNIO TAKAHASHI, Shigeki SAITO.

Language

English

Journal/Book name

Japanese:
English:	Abstracts

Volume, Number, Page

V17.41

Published date

Nov. 28, 2011

Publisher

Japanese:
English:

Conference name

Japanese:
English:	MRS 2011 Fall Meeting

Conference site

Japanese:
English:	Boston