Low-Loss GaInAsP Wire Waveguide on Si Substrate with Benzocyclobutene Adhesive Wafer Bonding for Membrane Photonic Circuits

Publication Information

Title

Japanese:
English:	Low-Loss GaInAsP Wire Waveguide on Si Substrate with Benzocyclobutene Adhesive Wafer Bonding for Membrane Photonic Circuits

Author

Japanese:	李智恩, 前田泰奈, 渥美裕樹, 瀧野祐太, 西山伸彦, 荒井滋久.
English:	Jieun Lee, Yasuna Maeda, Yuki Atsumi, Yuuta Takino, Nobuhiko Nishiyama, SHIGEHISA ARAI.

Language

English

Journal/Book name

Japanese:
English:	Japanese Journal of Applied Physics (JJAP)

Volume, Number, Page

Vol. 51 pp. 042201-1 - 042201-5

Published date

Apr. 25, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI