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Publication Information
Title
Japanese:
無水フッ酸エッチングによるシリコンナノ結晶の自然酸化膜の除去
English:
Author
Japanese:
中峯嘉文
,
小寺哲夫
,
河野行雄
,
内田 建
,
小田俊理
.
English:
Yoshifumi Nakamine
,
Tetsuo Kodera
,
Yukio Kawano
,
Ken Uchida
,
SHUNRI ODA
.
Language
Japanese
Journal/Book name
Japanese:
English:
Volume, Number, Page
17p-GP11-9
Published date
Mar. 2012
Publisher
Japanese:
English:
Conference name
Japanese:
第59回応用物理学関係連合講演会
English:
Conference site
Japanese:
東京都
English:
©2007
Tokyo Institute of Technology All rights reserved.