Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators

Publication Information

Title

Japanese:
English:	Multi-physics Equivalent Circuit Models for MEMS Sensors and Actuators

Author

Japanese:	小西敏文, 町田克之, 益一哉, 年吉洋.
English:	Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Hiroshi Toshiyoshi.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 7, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	The 1st Int. Symp. on More-than-Moore, the 222nd Meeting of the Electrochemical Society / The 2012 Pacific Rim Meeting on Electrochemical and Solid-State Science (PRiME)

Conference site

Japanese:
English:	Honolulu, Hawaii

Official URL