Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers

Publication Information

Title

Japanese:
English:	Evaluation of a Capacitive Sensor with a Gold Proof Mass Toward Integrated CMOS-MEMS Accelerometers

Author

Japanese:	山根大輔, 松島隆明, 小西敏文, 本橋剛, 伊藤浩之, 石原昇, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Takaaki Matsushima, Toshifumi Konishi, Gou Motohashi, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Oct. 30, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	25th Int. Microprocesses and Nanotechnology Conference (MNC 2012)

Conference site

Japanese:
English:	Kobe

Official URL