GaN薄膜成長におけるScAlMgO4格子整合バッファ層の効果

Publication Information

Title

Japanese:	GaN薄膜成長におけるScAlMgO4格子整合バッファ層の効果
English:

Author

Japanese:	片瀬貴義, 野村研二, 篠崎智正, 柳博, 太田裕道, 神谷利夫, 平野正浩, 細野秀雄.
English:	Takayoshi Katase, Kenji Nomura, Tomomasa Shinozaki, Hiroshi Yanagi, 太田裕道, TOSHIO KAMIYA, Masahiro Hirano, HIDEO HOSONO.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2008

Publisher

Japanese:
English:

Conference name

Japanese:	薄膜材料デバイス研究会第5回研究集会
English:

Conference site

Japanese:
English: