A Multi-Physics Simulation Technique for Integrated MEMS

Publication Information

Title

Japanese:
English:	A Multi-Physics Simulation Technique for Integrated MEMS

Author

Japanese:	年吉洋, 小西敏文, 町田克之, 益一哉.
English:	Hiroshi Toshiyoshi, Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

Dec. 10, 2012

Publisher

Japanese:
English:

Conference name

Japanese:
English:	2012 IEEE International Electron Devices Meeting (IEDM 2012)

Conference site

Japanese:
English:	San Francisco, CA

Official URL