不純物濃度低減を目指したInGaP上伸張歪Ge薄膜の成長と評価

Publication Information

Title

Japanese:	不純物濃度低減を目指したInGaP上伸張歪Ge薄膜の成長と評価
English:	Growth and Characterization of Tensile-Strained Ge Thin Films on InGaP

Author

Japanese:	山下明矩, 星名豊, 山田明.
English:	Akinori Yamashita, Yutaka Hoshina, Akira Yamada.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:	応用物理学会 2012 春季
English:	The Japan Society of Applied Physics

Conference site

Japanese:	東京
English: