Compliant electrostatic chuck based on hairy microstructure

Publication Information

Title

Japanese:
English:	Compliant electrostatic chuck based on hairy microstructure

Author

Japanese:	齋藤滋規, 早田史明, RADONDHELIKA, 高橋邦夫, 宝田亘, 鞠谷雄士.
English:	Shigeki SAITO, Fumiaki Soda, Radon Dhelika, KUNIO TAKAHASHI, wataru takarada, TAKESHI KIKUTANI.

Language

English

Journal/Book name

Japanese:
English:	Smart Materials and Structures

Volume, Number, Page

Vol. 22 pp. 015019(1-6)

Published date

Dec. 17, 2012

Publisher

Japanese:
English:	IOP Publiching

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI