Development of Mathematical Model Considering High-NA Imaging for Aberration Retrieval Method from Spot Images

Publication Information

Title

Japanese:
English:	Development of Mathematical Model Considering High-NA Imaging for Aberration Retrieval Method from Spot Images

Author

Japanese:	岡田和佳, 天谷賢治, 大西有希.
English:	Kazuyoshi Okada, KENJI AMAYA, YUKI ONISHI.

Language

English

Journal/Book name

Japanese:
English:	Theoretical and Applied Mechanics Japan

Volume, Number, Page

Vol. 61 pp. 215-223

Published date

May 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL