Channel Length Scaling and Surface Nitridation of Silicon Nanocrystals for High Performance Electron Device

Publication Information

Title

Japanese:
English:	Channel Length Scaling and Surface Nitridation of Silicon Nanocrystals for High Performance Electron Device

Author

Japanese:	Susoma Jannatul, 中峯嘉文, 近藤信啓, 小寺哲夫, 宇佐美浩一, 河野行雄, 小田俊理.
English:	Jannatul susoma, 中峯嘉文, 近藤信啓, 小寺哲夫, 宇佐美浩一, 河野行雄, 小田俊理.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:	第73回応用物理学会学術講演会
English:

Conference site

Japanese:	愛媛県松山市
English: