Epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface

Publication Information

Title

Japanese:	Epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface
English:	Epitaxial silicon oxynitride layer on a 6H-SiC(0001) surface

Author

Japanese:	T. Shirasawa, K. Hayashi, S. Mizuno, S. Tanaka, K. Nakatsuji, F. Komori, H. Tochihara.
English:	T. Shirasawa, K. Hayashi, S. Mizuno, S. Tanaka, K. Nakatsuji, F. Komori, H. Tochihara.

Language

English

Journal/Book name

Japanese:	Phys. Rev. Lett.
English:	Phys. Rev. Lett.

Volume, Number, Page

Vol. 98 pp. 4

Published date

2007

Publisher

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English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI