Nitrogen incorporated La-silicate gate dielectric with high scalability

Publication Information

Title

Japanese:
English:	Nitrogen incorporated La-silicate gate dielectric with high scalability

Author

Japanese:	川那子高暢, 角嶋邦之, パールハットアヘメト, 西山彰, 杉井信之, 筒井一生, 名取研二, 服部健雄, 岩井洋.
English:	Takamasa Kawanago, Kuniyuki KAKUSHIMA, パールハットアヘメト, 西山彰, Nobuyuki Sugii, KAZUO TSUTSUI, KENJI NATORI, takeo hattori, HIROSHI IWAI.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	[G-COE PICE International Symposium and IEEE EDS Minicolloquium on Advanced Hybrid Nano Devices: Prospects by World’s Leading Scientists

Conference site

Japanese:	東京
English: