Electrostatic chuck consisting of polymeric electrostatic inductive fibersfor handling of objects with rough surfaces

Publication Information

Title

Japanese:
English:	Electrostatic chuck consisting of polymeric electrostatic inductive fibersfor handling of objects with rough surfaces

Author

Japanese:	RADON DHELIKA, 澤井賢司, 高橋邦夫, 宝田亘, 鞠谷雄士, 齋藤滋規.
English:	Radon Dhelika, Kenji Sawai, Kunio Takahashi, Wataru Takarada, Takeshi Kikutani, Shigeki Saito.

Language

English

Journal/Book name

Japanese:
English:	Smart Materials and Structures

Volume, Number, Page

No. 22 pp. 9

Published date

Aug. 6, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI