Comparative study of electrical characteristics in(100) and (110)surface-oriented nMOSFETs with direct contact La-silicate/Si interface structure

Publication Information

Title

Japanese:
English:	Comparative study of electrical characteristics in(100) and (110)surface-oriented nMOSFETs with direct contact La-silicate/Si interface structure

Author

Language

English

Journal/Book name

Japanese:
English:	Solid-State Electronics

Volume, Number, Page

Vol. 84 pp. 53-57

Published date

June 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI