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Title
Japanese:アレイ型ＭＥＭＳ加速度センサの基本特性評価 
English: 
Author
Japanese: 山根大輔, 小西敏文, 松島隆明, 加賀谷 賢, 佃 真文, 伊藤浩之, 石原 昇, 年吉 洋, 町田克之, 益 一哉.  
English: Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Ken Kagaya, Masafumi Tsukuda, Hiroyuki Ito, Noboru Ishihara, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. 18p-P11-4
Published date Sept. 16, 2013 
Publisher
Japanese: 
English: 
Conference name
Japanese:第７４回応用物理学会秋季学術講演会・半導体A（ＭＥＭＳ、ＮＥＭＳの基礎と応用：異種機能集積化） 
English: 
Conference site
Japanese:京都 
English: 
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