Effect of substrate temperature on the magnetic properties and internal stresses of CoPt/AlN multilayer deposited by dc magnetron sputtering

Publication Information

Title

Japanese:	Effect of substrate temperature on the magnetic properties and internal stresses of CoPt/AlN multilayer deposited by dc magnetron sputtering
English:	Effect of substrate temperature on the magnetic properties and internal stresses of CoPt/AlN multilayer deposited by dc magnetron sputtering

Author

Japanese:	H. Y. An, S. Takada, T. Sannomiya, S. Muraishi, J. Shi, Y. Nakamura.
English:	H. Y. An, S. Takada, T. Sannomiya, S. Muraishi, J. Shi, Y. Nakamura.

Language

English

Journal/Book name

Japanese:	Applied Physics a-Materials Science & Processing
English:	Applied Physics a-Materials Science & Processing

Volume, Number, Page

Vol. 113 pp. 31-35

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI