高配向（金属-AlN）多層膜の Cs 補正 STEM 観察

Publication Information

Title

Japanese:	高配向（金属-AlN）多層膜の Cs 補正 STEM 観察
English:

Author

Japanese:	春本高志, 三宮工, 村石信二, 史蹟, 中村吉男, 沢田英敬, 田中崇之, 谷城康眞, 高柳邦夫.
English:	Takashi HARUMOTO, Takumi Sannomiya, Shinji Muraishi, Ji Shi, YOSHIO NAKAMURA, 沢田英敬, Takayuki TANAKA, YASUMASA TANISHIRO, kunio Takayanagi.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

2012

Publisher

Japanese:
English:

Conference name

Japanese:	顕微鏡学会
English:

Conference site

Japanese:	つくば
English: