Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr0:3,Ti0:7)O3 Thin Films on Microelectromechanical Systems Microcantilevers

Publication Information

Title

Japanese:
English:	Effects of Bipolar Pulse Poling on the Ferroelectric and Piezoelectric Properties of Tetragonal Composition Pb(Zr0:3,Ti0:7)O3 Thin Films on Microelectromechanical Systems Microcantilevers

Author

Japanese:	Takeshi Kobayashi, Natsumi Makimoto, Yasuhiro Suzuki, 舟窪浩, 及川貴弘, Auyumi Wada, Ryutaro Maeda.
English:	Takeshi Kobayashi, Natsumi Makimoto, Yasuhiro Suzuki, Hiroshi Funakubo, Takahiro Oikawa, Auyumi Wada, Ryutaro Maeda.

Language

English

Journal/Book name

Japanese:
English:	Jpn. J. Appl.pPhys.

Volume, Number, Page

Vol. 52 pp. 09KA01-1-6

Published date

2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: