Design of sub-1g microelectromechanical systems accelerometers

Publication Information

Title

Japanese:
English:	Design of sub-1g microelectromechanical systems accelerometers

Author

Japanese:	山根大輔, 小西敏文, 松島隆明, 町田克之, 年吉洋, 益一哉.
English:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	Applied Physics Letters

Volume, Number, Page

Vol. 104 No. 7 pp. 74102

Published date

Feb. 17, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI