Deflection properties of a MEMS Optical Scanner with Four Torsion Beam and L-shaped Arms

Publication Information

Title

Japanese:
English:	Deflection properties of a MEMS Optical Scanner with Four Torsion Beam and L-shaped Arms

Author

Japanese:	井関隆之, 奥村実紀雄, 菅原孝, 黒澤実.
English:	T. Iseki, M. Okumura, T. Sugawara, M. K. Kurosawa.

Language

English

Journal/Book name

Japanese:
English:	Sensors & Actuators A: Physical

Volume, Number, Page

Vol. 178 pp. 154-163

Published date

May 2012

Publisher

Japanese:
English:	Elsevier B.V.

Conference name

Japanese:
English:

Conference site

Japanese:
English: