Overlap Area Maximization in Stitch Selection for LELE Double Patterning

Publication Information

Title

Japanese:
English:	Overlap Area Maximization in Stitch Selection for LELE Double Patterning

Author

Japanese:	小平行秀, Yoko Takekawa, Chikaaki Kodama, 高橋篤司, Shigeki Nojima, Satoshi Tanaka.
English:	Yukihide Kohira, Yoko Takekawa, Chikaaki Kodama, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:	第26回回路とシステムワークショップ論文集
English:	Proc. the 26th Workshop on Circuits and Systems

Volume, Number, Page

pp. 466-471

Published date

July 30, 2013

Publisher

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English:

Conference name

Japanese:
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Conference site

Japanese:
English:

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