A Study of Robust Stitch Design for Litho-etch-litho-etch Double Patterning

Publication Information

Title

Japanese:
English:	A Study of Robust Stitch Design for Litho-etch-litho-etch Double Patterning

Author

Japanese:	Yoko Takekawa, Chikaaki Kodama, 高橋篤司, 小平行秀, Satoshi Tanaka, Keishi Sakanushi, Jiro Higuchi, Shigeki Nojima.
English:	Yoko Takekawa, Chikaaki Kodama, Atsushi Takahashi, Yukihide Kohira, Satoshi Tanaka, Keishi Sakanushi, Jiro Higuchi, Shigeki Nojima.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 3, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Design for Manufacturability and Yield 2013 (DFM&Y2013)

Conference site

Japanese:
English: