Minimum Cost Stitch Selection in LELE Double Patterning

Publication Information

Title

Japanese:
English:	Minimum Cost Stitch Selection in LELE Double Patterning

Author

Japanese:	小平行秀, Yoko Takekawa, Chikaaki Kodama, 高橋篤司, Shigeki Nojima, Satoshi Tanaka.
English:	Yukihide Kohira, Yoko Takekawa, Chikaaki Kodama, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

Published date

June 3, 2013

Publisher

Japanese:
English:

Conference name

Japanese:
English:	Design for Manufacturability and Yield 2013 (DFM&Y2013)

Conference site

Japanese:
English: