側壁ダブルパターニングのための修正2色グリッド配線法

Publication Information

Title

Japanese:	側壁ダブルパターニングのための修正2色グリッド配線法
English:	Self-Aligned Double Patterning-Aware Modified Two-color Grid Routing

Author

Japanese:	井原岳志, 高橋篤司, 児玉親亮.
English:	Takeshi Ihara, Atsushi Takahashi, Chikaaki Kodama.

Language

Japanese

Journal/Book name

Japanese:	電子情報通信学会技術研究報告 (VLD2013-150)
English:	IEICE Technical Report (VLD2013-150)

Volume, Number, Page

Vol. 113 No. 454 pp. 93-98

Published date

Mar. 4, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	VLSI設計技術研究会
English:	Technical Committee on VLSI Design Technologies

Conference site

Japanese:
English: