Localization concept of re-decomposition area to fix hotspots for LELE process

Publication Information

Title

Japanese:
English:	Localization concept of re-decomposition area to fix hotspots for LELE process

Author

Japanese:	Yoko Yokoyama, Keishi Sakanushi, 小平行秀, 高橋篤司, Chikaaki Kodama, Satoshi Tanaka, Shigeki Nojima.
English:	Yoko Yokoyama, Keishi Sakanushi, Yukihide Kohira, Atsushi Takahashi, Chikaaki Kodama, Satoshi Tanaka, Shigeki Nojima.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530V

Volume, Number, Page

1-8

Published date

Mar. 28, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI