Yield-aware decomposition for LELE double patterning

Publication Information

Title

Japanese:
English:	Yield-aware decomposition for LELE double patterning

Author

Japanese:	小平行秀, Yoko Yokoyama, Chikaaki Kodama, 高橋篤司, Shigeki Nojima, Satoshi Tanaka.
English:	Yukihide Kohira, Yoko Yokoyama, Chikaaki Kodama, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

English

Journal/Book name

Japanese:
English:	Proc. SPIE 9053, Design-Process-Technology Co-optimization for Manufacturability VIII, 90530T

Volume, Number, Page

1-10

Published date

Mar. 28, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

File

DOI