Investigation of hydrogen plasma treatment for reducing defects in silicon quantum dot superlattice structure with amorphous silicon carbide matrix

Publication Information

Title

Japanese:
English:	Investigation of hydrogen plasma treatment for reducing defects in silicon quantum dot superlattice structure with amorphous silicon carbide matrix

Author

Japanese:	山田繁, 黒川康良, 宮島晋介, 小長井誠.
English:	Shigeru Yamada, Yasuyoshi Kurokawa, Shinsuke Miyajima, Makoto Konagai.

Language

English

Journal/Book name

Japanese:
English:	Nanoscale Research Letters

Volume, Number, Page

Vol. 9 pp. 72

Published date

Feb. 12, 2014

Publisher

Japanese:
English:	Springer

Conference name

Japanese:
English:

Conference site

Japanese:
English:

Official URL

DOI