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Title
Japanese:La2O３/ InGaAs界面ラフネスに及ぼすALDプロセスの影響 
English: 
Author
Japanese: 大嶺洋, ｻﾞﾃﾞﾊｻﾝ ﾀﾞﾘﾕｰｼﾕ, 角嶋邦之, 西山彰, 杉井信之, 片岡好則, 若林整, 筒井一生, 名取研二, 岩井洋.  
English: Hiroshi Oomine, DARYOUSH ZADEH, Kuniyuki KAKUSHIMA, Akira Nishiyama, Nobuyuki Sugii, Yoshinori Kataoka, Hitoshi Wakabayashi, KAZUO TSUTSUI, Kenji Natori, HIROSHI IWAI.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page        
Published date 2014 
Publisher
Japanese: 
English: 
Conference name
Japanese:第61回応用物理学会春季学術講演会 
English: 
Conference site
Japanese: 
English: 

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