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Title
Japanese:集積化CMOS-MEMS加速度センサへ向けたsub-1Gセンサ 
English: 
Author
Japanese: 山根大輔, 亀井将太, 小西敏文, 松島隆明, 年吉 洋, 益 一哉, 町田克之.  
English: Daisuke Yamane, Shota Kamei, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page         pp. P4
Published date July 11, 2014 
Publisher
Japanese: 
English: 
Conference name
Japanese:応用物理学会集積化MEMS技術研究会 第5回集積化MEMS技術研究ワークショップ 
English: 
Conference site
Japanese:愛知県豊橋市 
English: 
Official URL http://annex.jsap.or.jp/MEMS/news/041_5th_WS_Toyohashi0711.html
 

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