Integrated CMOS-MEMS Technology and Its Applications

Publication Information

Title

Japanese:
English:	Integrated CMOS-MEMS Technology and Its Applications

Author

Japanese:	町田克之, 小西敏文, 山根大輔, 年吉洋, 益一哉.
English:	Katsuyuki Machida, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu.

Language

English

Journal/Book name

Japanese:
English:	ECS Transactions

Volume, Number, Page

volume 61 no. 6 pp. 21-39

Published date

May 11, 2014

Publisher

Japanese:
English:	The Electrochemical Society

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI