Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators

Publication Information

Title

Japanese:
English:	Multi-Physics Equivalent Circuit Model for MEMS Sensors and Actuators

Author

Japanese:	小西敏文, 町田克之, 益一哉, 年吉洋.
English:	Toshifumi Konishi, Katsuyuki Machida, Kazuya Masu, Hiroshi Toshiyoshi.

Language

English

Journal/Book name

Japanese:
English:	ECS Transactions

Volume, Number, Page

volume 50 no. 14 pp. 55-61

Published date

Oct. 7, 2012

Publisher

Japanese:
English:	The Electrochemical Society

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI