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Title
Japanese:対向ターゲット式スパッタ法を用いたTi/Ru/FeCo多層構造成膜時の異方的内部応力観測 
English: 
Author
Japanese: 林原久憲, 高村陽太, 中川茂樹.  
English: Hisanori Hayashibara, Yota Takamura, Shigeki Nakagawa.  
Language Japanese 
Journal/Book name
Japanese: 
English: 
Volume, Number, Page 1-7A       
Published date June 3, 2014 
Publisher
Japanese: 
English: 
Conference name
Japanese:粉体粉末冶金協会 平成26年度春季大会（第113回講演大会） 
English: 
Conference site
Japanese:東京都新宿区 
English: 

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