半正定値緩和法を用いたLELECUTトリプルパターニングのためのレイアウト分割手法

Publication Information

Title

Japanese:	半正定値緩和法を用いたLELECUTトリプルパターニングのためのレイアウト分割手法
English:	LELECUT Triple Patterning Lithography Layout Decomposition using Positive Semidefinite Relaxation

Author

Japanese:	小平行秀, 松井知己, 横山陽子, 児玉親亮, 高橋篤司, 野嶋茂樹, 田中聡.
English:	Yukihide Kohira, Tomomi Matsui, Yoko Yokoyama, Chikaaki Kodama, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

Japanese

Journal/Book name

Japanese:	電子情報通信学会技術研究報告 (VLD2014-6)
English:	IEICE Technical Report (VLD2014-6)

Volume, Number, Page

Vol. 114 No. 59 pp. 27-32

Published date

May 29, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	VLSI設計技術研究会
English:	Technical Committee on VLSI Design Technologies

Conference site

Japanese:
English:

Official URL