LELEダブルパターニングのための歩留まりを考慮した高速マスク割り当て手法

Publication Information

Title

Japanese:	LELEダブルパターニングのための歩留まりを考慮した高速マスク割り当て手法
English:	Fast Mask Assignment Method Considering Yield for LELE Double Patterning

Author

Japanese:	小平行秀, 横山陽子, 児玉親亮, 高橋篤司, 野嶋茂樹, 田中聡.
English:	Yukihide Kohira, Yoko Yokoyama, Chikaaki Kodama, Atsushi Takahashi, Shigeki Nojima, Satoshi Tanaka.

Language

Japanese

Journal/Book name

Japanese:	次世代リソグラフィワークショップ予稿集 (NGL2014)
English:	Collection of Abstracts, NGL 2014

Volume, Number, Page

pp. 41-42

Published date

July 17, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English: