A New Intensity Based Edge Placement Error Optimization Algorithm for Optical Lithography

Publication Information

Title

Japanese:
English:	A New Intensity Based Edge Placement Error Optimization Algorithm for Optical Lithography

Author

Japanese:	AWAD Ahmed, 高橋篤司, 田中聡, 児玉親亮.
English:	Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:	第27回回路とシステムワークショップ論文集
English:	Proc. the 27th Workshop on Circuits and Systems

Volume, Number, Page

pp. 422-427

Published date

Aug. 5, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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