A Process Variability Band Area Reduction Algorithm For Optical Lithography

Publication Information

Title

Japanese:
English:	A Process Variability Band Area Reduction Algorithm For Optical Lithography

Author

Japanese:	AWAD Ahmed, 高橋篤司, 田中聡, 児玉親亮.
English:	Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:	電子情報通信学会 2014年ソサイエティ大会講演論文集 (A-3-6)
English:	Proc. the 2014 IEICE Society Conference (A-3-6)

Volume, Number, Page

Vol. A p. 50

Published date

Sept. 23, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

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