対向ターゲット式スパッタ法を用いた垂直磁気異方性を有するCo2FeSi/MgO及びMgO/Co2FeSi構造の作製と評価

Publication Information

Title

Japanese:	対向ターゲット式スパッタ法を用いた垂直磁気異方性を有するCo2FeSi/MgO及びMgO/Co2FeSi構造の作製と評価
English:	Co2FeSi/MgO and MgO/Co2FeSi structures with perpendicular magnetic anisotropy formed by facing targets sputtering method

Author

Japanese:	鈴木隆寛, 篠原光貴, 高村陽太, 中川茂樹.
English:	Takahiro Suzuki, Kouki Shinohara, Yota Takamura, Shigeki Nakagawa.

Language

Japanese

Journal/Book name

Japanese:	第38回日本磁気学会学術講演会
English:	the 38th Annual Conference on MAGNETICS in Japan

Volume, Number, Page

2aD-5

Published date

Sept. 2, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	第38回日本磁気学会学術講演会
English:	the 38th Annual Conference on MAGNETICS in Japan

Conference site

Japanese:	神奈川県横浜市
English:	Yokohama, Kanagawa

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