集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討

Publication Information

Title

Japanese:	集積化CMOS?MEMS加速度センサへ向けたsub-1G静電容量型センサの検討
English:

Author

Japanese:	亀井将太, 山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉.
English:	Shota Kamei, Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 13-065

Published date

Sept. 17, 2014

Publisher

Japanese:
English:

Conference name

Japanese:	第７５回応用物理学会秋季学術講演会
English:

Conference site

Japanese:	北海道札幌市
English:

Official URL