Roles of Hydrogen in Amorphous Oxide Semiconductor In-Ga-Zn-O: Comparison of Conventional and Ultra-High-Vacuum Sputtering

Publication Information

Title

Japanese:
English:	Roles of Hydrogen in Amorphous Oxide Semiconductor In-Ga-Zn-O: Comparison of Conventional and Ultra-High-Vacuum Sputtering

Author

Japanese:	宮瀬貴也, Ken Watanabe, Isao Sakaguchi, Naoki Ohashi, Kay Domen, 野村研二, 平松秀典, 雲見日出也, 細野秀雄, 神谷利夫.
English:	Takaya Miyase, Ken Watanabe, Isao Sakaguchi, Naoki Ohashi, Kay Domen, Kenji Nomura, Hidenori Hiramatsu, Hideya Kumomi, Hideo Hosono, Toshio Kamiya.

Language

English

Journal/Book name

Japanese:
English:	ECS J. Solid State Sci. Technol.

Volume, Number, Page

Vol. 3 pp. Q3085-Q3090

Published date

2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:

DOI