A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology

Publication Information

Title

Japanese:
English:	A MEMS Energy Harvesting Device for Integrated CMOS-MEMS Technology

Author

Japanese:	松島隆明, 小西敏文, 山根大輔, 年吉洋, 益一哉, 町田克之.
English:	Takaaki Matsushima, Toshifumi Konishi, Daisuke Yamane, Hiroshi Toshiyoshi, Kazuya Masu, Katsuyuki Machida.

Language

English

Journal/Book name

Japanese:
English:

Volume, Number, Page

pp. 6C-5-5

Published date

Nov. 4, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:	27th Int. Microprocesses and Nanotechnology Conference (MNC 2014)

Conference site

Japanese:
English:	Fukuoka

Official URL