A Fast Process Variation and Pattern Fidelity Aware Mask Optimization Algorithm

Publication Information

Title

Japanese:
English:	A Fast Process Variation and Pattern Fidelity Aware Mask Optimization Algorithm

Author

Japanese:	AWAD Ahmed, 高橋篤司, Satoshi Tanaka, Chikaaki Kodama.
English:	Ahmed Awad, Atsushi Takahashi, Satoshi Tanaka, Chikaaki Kodama.

Language

English

Journal/Book name

Japanese:
English:	Proc. IEEE/ACM 2014 International Conference on Computer-Aided Design (ICCAD 2014)

Volume, Number, Page

pp. 238-245

Published date

Nov. 3, 2014

Publisher

Japanese:
English:

Conference name

Japanese:
English:

Conference site

Japanese:
English:	San Jose

Official URL

DOI