Stability of Movable Structure Formed by Au Electroplating for MEMS Devices

Publication Information

Title

Japanese:
English:	Stability of Movable Structure Formed by Au Electroplating for MEMS Devices

Author

Japanese:	寺西美波, TSO-FU MARK CHANG, 小西敏文, 町田克之, 山根大輔, 伊藤浩之, 益一哉, 里達雄, 曽根正人, 曽根正人.
English:	Minami Teranishi, Tso-Fu Mark Chang, Toshifumi Konishi, Masaki Yano, Katsuyuki Machida, Daisuke Yamane, Hiroyuki Ito, Kazuya Masu, Tatsuo Sato, Masato Sone.

Language

English

Journal/Book name

Japanese:
English:	ICMAT2015 & IUMRS-ICA2015,

Volume, Number, Page

Published date

June 28, 2015

Publisher

Japanese:
English:

Conference name

Japanese:
English:	ICMAT2015 & IUMRS-ICA2015,

Conference site

Japanese:
English:	Singapore