Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討

Publication Information

Title

Japanese:	Sub-1Gから20Gまで検知可能な集積化MEMS加速度センサの検討
English:

Author

Japanese:	山根大輔, 小西敏文, 松島隆明, 年吉洋, 町田克之, 益一哉.
English:	Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Hiroshi Toshiyoshi, Katsuyuki Machida, Kazuya Masu.

Language

Japanese

Journal/Book name

Japanese:
English:

Volume, Number, Page

p. 17-189

Published date

Mar. 11, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	第62回応用物理学会春季学術講演会
English:

Conference site

Japanese:	神奈川県
English:

Official URL