A Fast Lithographic Mask Correction Algorithm

Publication Information

Title

Japanese:
English:	A Fast Lithographic Mask Correction Algorithm

Author

Japanese:	AWAD Ahmed, 高橋篤司.
English:	Ahmed Awad, Atsushi Takahashi.

Language

English

Journal/Book name

Japanese:	電子情報通信学会技術研究報告 (VLD2014-153)
English:	IEICE Technical Report (VLD2014-153)

Volume, Number, Page

Vol. 114 No. 476 pp. 1-6

Published date

Mar. 2, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	VLSI設計技術研究会
English:	Technical Committee on VLSI Design Technologies

Conference site

Japanese:
English: