側壁プロセス配線におけるカットパターン削減手法

Publication Information

Title

Japanese:	側壁プロセス配線におけるカットパターン削減手法
English:	A cut-pattern reduction method for routing in Self-Aligned Double Patterning

Author

Japanese:	高橋紀之, 井原岳志, 高橋篤司.
English:	Noriyuki Takahashi, Takeshi Ihara, Atsushi Takahashi.

Language

Japanese

Journal/Book name

Japanese:	電子情報通信学会技術研究報告 (VLD2014-154)
English:	IEICE Technical Report (VLD2014-154)

Volume, Number, Page

Vol. 114 No. 476 pp. 7-12

Published date

Mar. 2, 2015

Publisher

Japanese:
English:

Conference name

Japanese:	VLSI設計技術研究会
English:	Technical Committee on VLSI Design Technologies

Conference site

Japanese:
English: